Thin Film Processes
John L. Vossen (Auth.)
Remarkable advances have been made in recent years in the science and technology of thin film processes for deposition and etching. It is the purpose of this book to bring together tutorial reviews of selected filmdeposition and etching processes from a process viewpoint. Emphasis is placed on the practical use of the processes to provide working guidelines for their implementation, a guide to the literature, and an overview of each process
Категорії:
Рік:
1978
Видавництво:
Academic Press
Мова:
english
Сторінки:
553
ISBN 10:
0127282505
ISBN 13:
9780127282503
Файл:
PDF, 8.35 MB
IPFS:
,
english, 1978